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发明名称
Method for forming the capacitor of Metal-Insulator-Metal structure
摘要
申请公布号
KR100607660(B1)
申请公布日期
2006.08.02
申请号
KR20020043975
申请日期
2002.07.25
申请人
发明人
分类号
H01L27/108
主分类号
H01L27/108
代理机构
代理人
主权项
地址
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