发明名称 Semiconductor device, display device and method of fabricating the same
摘要 A method of fabricating a thin film transistor by setting the temperature of a heat treatment for crystallizing an active layer which is formed on a substrate at a level not deforming the substrate and activating an impurity layer in a heat treatment method different from that employed for the heat treatment, and a semiconductor device prepared by forming a heat absorption film, a semiconductor film, a gate insulating film, and a gate electrode on a substrate, the heat absorption film being provided within a region substantially corresponding to the semiconductor film.
申请公布号 US7084052(B2) 申请公布日期 2006.08.01
申请号 US20040917394 申请日期 2004.08.13
申请人 发明人
分类号 H01L21/425;G02F1/1362;H01L21/20;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/49;H01L29/786 主分类号 H01L21/425
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