| 摘要 |
PROBLEM TO BE SOLVED: To suppress the increase of the occupied area of a device as well as the rising of a cost to the minimum in accordance with upsizing of a board to be inspected. SOLUTION: An inspection stage which receives a board to be inspected from a delivery apparatus is selectively displaced by a displacement mechanism either to the delivery position where the received board comes to be horizontal or to an inspection position where the received board comes to be declined. COPYRIGHT: (C)2004,JPO |
