发明名称 |
Apparatus and method for limiting over travel in a probe card assembly |
摘要 |
Methods and apparatuses for testing semiconductor devices are disclosed. Over travel stops limit over travel of a device to be tested with respect to probes of a probe card assembly. Feedback control techniques are employed to control relative movement of the device and the probe card assembly. A probe card assembly includes flexible base for absorbing excessive over travel of the device to be tested with respect to the probe card assembly.
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申请公布号 |
US7084650(B2) |
申请公布日期 |
2006.08.01 |
申请号 |
US20020321743 |
申请日期 |
2002.12.16 |
申请人 |
FORMFACTOR, INC. |
发明人 |
COOPER TIMOTHY E.;ELDRIDGE BENJAMIN N.;REYNOLDS CARL V.;SHENOY RAVINDRA VAMAN |
分类号 |
G01R31/02;G01R3/00;G01R31/28 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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