发明名称 Enhancement of eddy current based measurement capabilities
摘要 A method and an apparatus for enhancement of the for measuring resistance-based features of a substrate is provided. The apparatus includes a sensor configured to detect a signal produced by a eddy current generated electromagnetic field. The magnetic field enhancing source is positioned to the alternative side of the object under measurement relative to the sensor to enable the sensitivity enhancing action. The sensitivity enhancing source increases the intensity of the eddy current generated in the object under measurement, and as a result the sensitivity of the sensor. A system enabled to determine a thickness of a layer and a method for determining a resistance-based feature characteristic are also provided.
申请公布号 US7084621(B2) 申请公布日期 2006.08.01
申请号 US20020256055 申请日期 2002.09.25
申请人 LAM RESEARCH CORPORATION 发明人 GOTKIS YEHIEL;KISTLER RODNEY;OWCZARZ ALEKSANDER;HEMKER DAVID;BRIGHT NICOLAS J.
分类号 G01B7/06;G01N27/02;H01L21/302;H01L21/461 主分类号 G01B7/06
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