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发明名称
method for forming contact plug
摘要
申请公布号
KR100606917(B1)
申请公布日期
2006.08.01
申请号
KR20040116415
申请日期
2004.12.30
申请人
发明人
分类号
H01L21/283
主分类号
H01L21/283
代理机构
代理人
主权项
地址
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