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发明名称
Method For Manufacturing Semiconductor Devices
摘要
申请公布号
KR100606532(B1)
申请公布日期
2006.07.31
申请号
KR20030053636
申请日期
2003.08.02
申请人
发明人
分类号
H01L21/28;G03F7/36;H01L21/311;H01L21/768
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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