| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multilayered reflecting mirror capable of efficiently removing carbon contamination deposited on the surface. <P>SOLUTION: A mirror base plate 1 is overlaid with a multilayer film 2 for reflecting coating. The multilayer film 2 is formed so as to partly overlap on a conductive thin film 4 and both are electrically connected. In the vicinity of the surface overlaid with the multilayer film 2 on the mirror base plate 1, a gas discharge mechanism 8 is provided. When oxygen gas is blown against the multilayer film 2 from the gas discharge mechanism 8 and a high-frequency voltage is impressed on the multilayer film 2, oxygen plasma is generated by glow discharge nearby the mirror surface and oxygen ion and oxygen radicals formed in it reach the surface of the multilayer film 2. The carbon contamination, deposited on the multilayer film 2 surface, is oxidized with the oxygen radicals and oxygen ion to be (carbon dioxide) gas and is removed by a vacuum exhaust device connected to a vacuum chamber. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
