| 摘要 |
PROBLEM TO BE SOLVED: To reduce the yield of a branching device in a polymer waveguide forming method with which a film is formed by spin coating. SOLUTION: In the method for forming a polymer waveguide, spin coating is performed by arranging all openings of Y-shaped branching parts of a branching device in a wafer, in the direction from the center of the rotary shaft of the spin coating toward the circumference. COPYRIGHT: (C)2006,JPO&NCIPI |
