| 摘要 |
A method for manufacturing a ferroelectric capacitor having a lower electrode, a ferroelectric film, and an upper electrode stacked on one another comprises the steps of performing batch dry-etching thereto, processing and forming the upper electrode, the ferroelectric film, and lower electrode, performing a process for removing reactive products adhered to sidewall portions of the ferroelectric capacitor, cleaning the ferroelectric capacitor with concentrated sulfuric acid, and performing a process for passivating sidewall portions of the ferroelectric film.
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