发明名称 |
Plasma-assisted nitrogen surface-treatment |
摘要 |
Methods and systems ( 10 ) for plasma-assisted nitrogen surface-treatments are provided. The method can include subjecting a gas ( 24 ) to electromagnetic radiation ( 26 ) in the presence of a plasma catalyst ( 100, 120, 140 ) to initiate a plasma containing nitrogen. The surface region of an object can be exposed to the plasma for a period of time sufficient to transfer at least some of the nitrogen from the plasma to the object through the surface region.
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申请公布号 |
US2006162818(A1) |
申请公布日期 |
2006.07.27 |
申请号 |
US20050513607 |
申请日期 |
2005.07.05 |
申请人 |
KUMAR DEVENDRA;KUMAR SATYENDRA |
发明人 |
KUMAR DEVENDRA;KUMAR SATYENDRA |
分类号 |
C23C8/36 |
主分类号 |
C23C8/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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