TABLE DEVICE AND ITS CONTROLLING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a table device and its controlling method capable of moving a main table accurately to any desired position on a plane using a simple constitution.

SOLUTION: The table device includes a first table 3 and a second table 4 which are arranged parallel in a bed part 2 and move along guide rails 13 and 14 in the longitudinal direction (Y-direction) in compliance with the drive of movable parts 19-22 provided in linear motors 15 and 16. Over the place the main table 5 is installed, which is coupled with main guide rails 33 and 43 formed on the surfaces of the first 3 and second tables 4. The propelling force for driving the movable parts 19-22 is calculated on the basis of the current position acquired by linear encoders 61-64. To the target position on the plane the main table 5 is moved in compliance with movement of the first 3 and second tables 4 on the basis of the propelling force.

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