| 摘要 |
PROBLEM TO BE SOLVED: To provide a dopant source for a fluorine-doped quartz preform which is capable of remarkably decreasing moisture or impurities in a fluorine-based gas atmosphere for doping fluorine into a porous quartz preform, a pipe for supplying and an inner surface treating method and a method of manufacturing the fluorine-doped quartz preform. SOLUTION: The dopant source for the fluorine-doped quartz preform is filled in a bomb. The bomb to be filled with a fluorine-based gas used as the dopant source for the fluorine-doped quartz preform is previously inner-surface-treated with activated fluorine. The feed pipe to pass the dopant source for the fluorine-doped quartz preform is also previously inner-surface-treated with activated fluorine. The inner surface treating method is for previously treating the inner surface of the bomb to be filled with the dopant source for the fluorine-doped quartz preform and the feed pipe with activated fluorine. COPYRIGHT: (C)2006,JPO&NCIPI |
