WAFER STAGE UNIT FOR EXPOSURE EQUIPMENT,申请号KR20050006372-传众专利搜索

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发明名称	WAFER STAGE UNIT FOR EXPOSURE EQUIPMENT
摘要
申请公布号	KR20060085482(A)	申请公布日期	2006.07.27
申请号	KR20050006372	申请日期	2005.01.24
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	LEE, SANG DAE
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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