| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique where, at the time when a metal mask 1 having a plurality of mask parts 2 is fixed to a frame in a state where tension is applied thereto, the positions of the respective mask parts are correctly aligned. SOLUTION: The respective sides of a metal mask 1 are held by a plurality of tension units 13, and pulled out, so as to apply tension to the metal mask 1. Further, a glass scale 25 is superimposed on the metal mask 1, and, the tension applied by the respective tension units 13 is controlled in such a manner that the cross marks formed at the metal mask 1 are made coincident with the standard lines of the glass scale 25, so as to correctly align the positions of the respective mask parts 2. Also, for attaining the control of the glass scale 25 so as to be made correctly parallel to the metal mask 1, the glass scale 25 is held via a fixed type spherical joint 37. COPYRIGHT: (C)2006,JPO&NCIPI
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