| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for producing a composite structure, which uniformly imparts a speed and concentration to particles. SOLUTION: The apparatus for producing the composite structure forms the structure made of the particles of a composing material on a substrate, by spouting an aerosol having the particles of a brittle material dispersed in a gas to the substrate through a nozzle to collide the aerosol with the surface of the substrate in an environment having a pressure lower than ambient pressure, and is characterized by the nozzle composing one part of the apparatus. The body of the nozzle is made from a hard material, and has an introduction opening formed of a single slit, which continuously leads to a dispersion cylinder; a space for passing the aerosol therethrough; and a feeding opening formed of a single slit for spouting the aerosol. The introduction opening formed of the slit has an equal wide side dimension to that of the feeding opening formed of the slit, and has a narrow side dimension equal to or larger than that of the feeding opening. COPYRIGHT: (C)2006,JPO&NCIPI
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