发明名称 VARIABLE RESISTANCE THIN-FILM ELEMENT AND NONVOLATILE MEMORY ELEMENT USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a variable resistance element wherein a change in resistance is generated by a power pulse, as well as a nonvolatile memory element using the same wherein a memory information is hard to be eliminated even if the power supply of the element is turned off, which reduces a variation of characteristic in the variable resistance element, and which improves reliability by orienting a perovskite oxide as a variable resistance material on (001) plane of rhombohedral and hexagonal system in priority. <P>SOLUTION: A variable resistance layer 15 is formed on a first electrode film 14, and a second electrode 16 is formed on the variable resistance layer 15. The variable resistance layer 15 is made of a rhombohedral perovskite oxide, and it is oriented in priority in the direction of (001) plane of the hexagonal system. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006196566(A) 申请公布日期 2006.07.27
申请号 JP20050004776 申请日期 2005.01.12
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 FUJII SATORU;KAWASHIMA YOSHIO;TAKAGI TAKESHI;OSANO KOICHI
分类号 H01L27/10;C23C14/08;C23C14/34 主分类号 H01L27/10
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