Apparatus and method for temperature control in plasma processing,申请号EP19960306459-传众专利搜索

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发明名称	Apparatus and method for temperature control in plasma processing
摘要
申请公布号	EP0762470(A3)	申请公布日期	1998.08.19
申请号	EP19960306459	申请日期	1996.09.05
申请人	APPLIED MATERIALS, INC.	发明人	RICE, MICHAEL;GROECHEL, DAVID W.;CRUSE, JAMES;COLLINS, KENNETH S.
分类号	C23F4/00;H01J37/32;H01L21/302;(IPC1-7):H01J37/32	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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