Transfer-ESC based on a wafer,申请号GB20060011846-传众专利搜索

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发明名称	Transfer-ESC based on a wafer
摘要
申请公布号	GB0611846(D0)	申请公布日期	2006.07.26
申请号	GB20060011846	申请日期	2006.06.14
申请人	RETZLAFF, UDO	发明人
分类号	H01L21/68;H01L21/683	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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