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发明名称
ION IMPLANTER ELECTRODES
摘要
申请公布号
EP1683176(A2)
申请公布日期
2006.07.26
申请号
EP20040795099
申请日期
2004.10.15
申请人
APPLIED MATERIALS, INC.
发明人
GOLDBERG, RICHARD, DAVID;ARMOUR, DAVID, GEORGE;BURGESS, CHRISTOPHER;MURRELL, ADRIAN, J.
分类号
H01J37/12;G21K5/10;H01J37/08;H01J37/317
主分类号
H01J37/12
代理机构
代理人
主权项
地址
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