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发明名称
APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060084651(A)
申请公布日期
2006.07.25
申请号
KR20050005426
申请日期
2005.01.20
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, SANG KYUNG
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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