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发明名称
PHOTOMASK APPARATUS REMOVING DEFECTIVE BYPRODUCTS OF A PHOTOMASK
摘要
申请公布号
KR20060083510(A)
申请公布日期
2006.07.21
申请号
KR20050004231
申请日期
2005.01.17
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, MIN AH;KIM, YONG HOON;CHA, BYUNG CHEOL
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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