| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact type measuring apparatus capable of realizing precise measurement. SOLUTION: In this contact type measuring apparatus provided with a slider 6 elevated along a support column 5 erected in a base 4, a driving means for elevating the slider 6 by rotation of a motor 73, a probe 9 provided in the slider 6 via a contact detecting means 8, and a displacement detecting means 10 for detecting a displacement of the probe 9, the displacement detecting means 10 is constituted to include a scale 101 provided in the probe 9, a detector 102 provided in the base 4, and an amplifier 103 for an LHS for amplifying a signal of the detector 102, and the motor 73 and the amplifier 103 for the LHS are stored in a heat source separation case 151 separated from the scale 101 and the detector 102. COPYRIGHT: (C)2006,JPO&NCIPI
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