| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an arrangement method of a process pattern, with which the number of steps for arrangement of a process pattern can be reduced and the reliability of the arranged process pattern can be improved. <P>SOLUTION: A plurality of virtual blocks B are set based on a combination of virtual scribes 12a, corresponding to a peripheral scribe constituting scribe data of a multi-die and to a plurality of inner scribes. Process patterns p1, p2, p3 are arranged automatically, based on arrangement conditions in virtual blocks in the order of few virtual scribes; and when necessary process patterns are arranged, the arrangement information is integrated into scribe data. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
