发明名称 TWO-FLUID NOZZLE FOR CLEANING AND CLEANING METHOD AND APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a two-fluid nozzle for cleaning which enables an attempt of reducing the amount of a high-pressure gas used while retaining advantages of high cleaning effect and efficiency and very little damage on articles. SOLUTION: The two-fluid nozzle spraying a liquid mist flow from a spraying outlet to impact the flow on an article to be cleaned and has a gas-liquid mixing section mixing a high-pressure gas with a high-pressure liquid to form liquid mist, a gas-introducing section introducing a high-pressure gas into the gas-liquid mixing section, a liquid-introducing section introducing a high-pressure liquid into the gas-liquid mixing section and an acceleration tube section having a passage from the gas-liquid mixing section to the spraying outlet within the tube section and imparting a momentum to the liquid mist within the passage to form a liquid mist flow. A spiral protrusion extending spirally in the longitudinal direction of the passage is formed on the inside wall of the passage within the acceleration tube. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006187707(A) 申请公布日期 2006.07.20
申请号 JP20050000552 申请日期 2005.01.05
申请人 HITACHI CHEM CO LTD;NIKKA EQUIPMENT & ENGINEERING CO LTD 发明人 YOSHIMURA TOYOFUSA
分类号 B05B7/04;B05B7/10;B08B3/02;H01L21/304 主分类号 B05B7/04
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