发明名称 CARBON NANOTUBE-CONTAINING METAL THIN FILM
摘要 A substrate on which a single-layer carbon nanotube is formed is plated with copper, thereby forming a copper thin film containing a single-layer carbon nanotube on the substrate. A thin film formed in this manner using a certain metal can have higher performance than a metal thin film made only of the certain metal.
申请公布号 WO2005091345(A8) 申请公布日期 2006.07.20
申请号 WO2005JP04938 申请日期 2005.03.18
申请人 JAPAN SCIENCE AND TECHNOLOGY AGENCY;MAEHASHI, KENZO;MATSUMOTO, KAZUHIKO;OHNO, YASUHIDE;INOUE, KOICHI 发明人 MAEHASHI, KENZO;MATSUMOTO, KAZUHIKO;OHNO, YASUHIDE;INOUE, KOICHI
分类号 C01B31/02;C25D15/00;C25D15/02;H01L21/288;H01L21/3205;H01L21/768;H01L23/52;H01L29/06 主分类号 C01B31/02
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