发明名称 HIGH-PRESSURE LIQUID JET TYPE CUTTING DEVICE AND HIGH-PRESSURE LIQUID JET TYPE CUTTING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a high-pressure liquid jet type cutting device which corrects a distortion having occurred at the time of cutting a first cutting line group, and then correctly cuts a second cutting line group. SOLUTION: According to the operation of the high-pressure liquid jet type cutting device, after the first cutting line group of a workpiece 35 has been cut, the workpiece 35 is mounted on a workpiece holding means 200, and when the second cutting line group is cut, a high-pressure liquid jetting means is relatively moved only in a Y axial direction without moving the location thereof in an X-axial direction with respect to the workpiece holding means 200, followed by cutting the second cutting line group. The high-pressure liquid jet type cutting device is formed of a pressing member 220 for pressing the workpiece 35 in the X axial direction; a butting member 230 against which the workpiece 35 pressed by the pressing member 220 is butted, to thereby lock the workpiece 35 at a predetermined location; and a moving means 250 for moving the workpiece 35 which has been cut along second cutting lines 359 into chips, in the Y axial direction. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006187829(A) 申请公布日期 2006.07.20
申请号 JP20050000972 申请日期 2005.01.05
申请人 DISCO ABRASIVE SYST LTD 发明人 TATEIWA SATOSHI;KIMURA KEN;YAJIMA KOICHI;MATSUBARA MASAYUKI;YAMAMOTO MASAAKI
分类号 B24C5/02;B26F3/00;H01L21/301 主分类号 B24C5/02
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