| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device and a method for improving the level of correction that can be achieved with a transmissive deformable lens element in a lithographic device. <P>SOLUTION: The lithographic device has: a deformable lens element through which a patterned radiation beam is arranged to pass before reaching a substrate; and a deformable lens actuator configured to transmit, at a plurality of sub-regions on the deformable lens element independently, a combination of a force substantially parallel to the optical axis of the projection system and a localized torque about an axis substantially perpendicular to the optical axis. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
