| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device of a transparent layer capable of inspecting an inspection object having two transparent layers with a simple constitution. SOLUTION: This device includes the first floodlighting part for irradiating the first P-wave laser beam 20 toward the first transparent layer 12 at the first incident angleα<SB>1</SB>, while changing an irradiation position 18a; an interference light receiving part for outputting a signal by detecting the intensity of interference light or an interference fringe generated between surface reflected light 22 reflected immediately by the first transparent layer 12 by the first laser beam 20 irradiated toward the first transparent layer 12 and interface reflected light 26 entering once the first transparent layer 12, then reflected by the interface 13 between the first transparent layer 12 and the second transparent layer 14, and emitted from the first transparent layer 12; and the first detection part for detecting a nonuniform part of the first transparent layer 12 based on the irradiation position 18a of the first laser beam 20 irradiated from the first floodlighting part and a signal outputted from the interference light receiving part. COPYRIGHT: (C)2006,JPO&NCIPI
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