发明名称 ELECTRODELESS LAMP FOR EMITTING ULTRAVIOLET AND/OR VACUUM ULTRAVIOLET RADIATION
摘要 An electrodeless lamp and process for emitting ultraviolet and/or vacuum ultraviolet radiation comprises an envelope formed of an ultra-pure and/or low-defect quartz material and an ultraviolet and/or vacuum ultraviolet emissive material disposed in the interior region of the envelope. The electrodeless lamp formed of the ultra-pure and/or low-defect quartz material minimizes degradation during use.
申请公布号 WO2006031650(A3) 申请公布日期 2006.07.20
申请号 WO2005US32179 申请日期 2005.09.08
申请人 AXCELIS TECHNOLOGIES, INC.;JANOS, ALAN;PACK, MALCOLM;KAMAREHI, MOHAMMAD;COLSON, MICHAEL 发明人 JANOS, ALAN;PACK, MALCOLM;KAMAREHI, MOHAMMAD;COLSON, MICHAEL
分类号 H01J61/30;C03C3/06;C03C4/00;H01J65/04 主分类号 H01J61/30
代理机构 代理人
主权项
地址