ELECTRODELESS LAMP FOR EMITTING ULTRAVIOLET AND/OR VACUUM ULTRAVIOLET RADIATION
摘要
An electrodeless lamp and process for emitting ultraviolet and/or vacuum ultraviolet radiation comprises an envelope formed of an ultra-pure and/or low-defect quartz material and an ultraviolet and/or vacuum ultraviolet emissive material disposed in the interior region of the envelope. The electrodeless lamp formed of the ultra-pure and/or low-defect quartz material minimizes degradation during use.
申请公布号
WO2006031650(A3)
申请公布日期
2006.07.20
申请号
WO2005US32179
申请日期
2005.09.08
申请人
AXCELIS TECHNOLOGIES, INC.;JANOS, ALAN;PACK, MALCOLM;KAMAREHI, MOHAMMAD;COLSON, MICHAEL
发明人
JANOS, ALAN;PACK, MALCOLM;KAMAREHI, MOHAMMAD;COLSON, MICHAEL