Inspektionsverfahren und -vorrichtung durch Sinterung,申请号DE20016014730T-传众专利搜索

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发明名称	Inspektionsverfahren und -vorrichtung durch Sinterung
摘要
申请公布号	DE60114730(T2)	申请公布日期	2006.07.20
申请号	DE20016014730T	申请日期	2001.08.21
申请人	TOKYO ELECTRON LTD.;SUGA, TADATOMO;ITOH, TOSHIHIRO	发明人	IINO, SHINJI;TAKEKOSHI, KIYOSHI;SUGA, TADATOMO;ITOH, TOSHIHIRO;KATAOKA, KENICHI
分类号	G01R1/067;G01R31/26;G01N27/30;G01R1/06;G01R31/28;H01L21/66	主分类号	G01R1/067
代理机构		代理人
主权项
地址

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