<p>A wafer carrier door having an inner door portion and an outer door portion. The inner door portion has a substantially continuous inner surface. The outer door portion extends over at least a portion of the inner door portion. The outer door portion has a plurality of apertures formed therein. The outer door portion is attached to the inner door portion.</p>
申请公布号
EP1680805(A2)
申请公布日期
2006.07.19
申请号
EP20040810521
申请日期
2004.11.08
申请人
ENTEGRIS, INC.
发明人
BURNS, JOHN;FULLER, MATTHEW, A.;KING, JEFFREY, J.;FORBES, MARTIN, L.;SMITH, MARK, V.
