发明名称 Thermo-mechanically actuated reflective structure
摘要 One embodiment of an optical modulator includes a substrate, a reflective structure, and at least three thermally actuated supports that movably support said reflective structure on said substrate.
申请公布号 US7079300(B1) 申请公布日期 2006.07.18
申请号 US20050045710 申请日期 2005.01.27
申请人 HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. 发明人 GOVYADINOV ALEXANDER;VAN LYDEGRAF CURT N.
分类号 G02F1/01 主分类号 G02F1/01
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