发明名称 |
Thermo-mechanically actuated reflective structure |
摘要 |
One embodiment of an optical modulator includes a substrate, a reflective structure, and at least three thermally actuated supports that movably support said reflective structure on said substrate.
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申请公布号 |
US7079300(B1) |
申请公布日期 |
2006.07.18 |
申请号 |
US20050045710 |
申请日期 |
2005.01.27 |
申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
GOVYADINOV ALEXANDER;VAN LYDEGRAF CURT N. |
分类号 |
G02F1/01 |
主分类号 |
G02F1/01 |
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