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发明名称
移除阻障物之研磨溶液
摘要
本研磨溶液可于非铁性互连金属存在下,优先地移除阻障材料且对于介电质的腐蚀有限。该研磨溶液包含0至20重量百分比的氧化剂、降低该非铁性互连金属的移除速率用的抑制剂、铵盐、0.1至50重量百分比之含0.001至1 ppm钠及0.001至1 ppm钾的二氧化矽,及余量的水;而且该溶液以无机酸作为滴定剂将pH值调至小于3。094139568-p01.bmp
申请公布号
TW200624544
申请公布日期
2006.07.16
申请号
TW094139568
申请日期
2005.11.11
申请人
罗门哈斯电子材料CMP控股公司
发明人
刘振东;奎西 约翰;史崔米特
分类号
C09K3/14;C09G1/02;H01L21/304
主分类号
C09K3/14
代理机构
代理人
洪武雄;陈昭诚
主权项
地址
美国
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