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发明名称
APPARATUS FOR OPENING AND CLOSING OF THE DOOR OF A PROCESS CHAMBER
摘要
申请公布号
KR20060081527(A)
申请公布日期
2006.07.13
申请号
KR20050002004
申请日期
2005.01.10
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHOI, BYOUNG SUN
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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