摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical element subjected to surface treatment of stable and low reflectance. <P>SOLUTION: In the optical element provided with a diffraction grating part 2 having a mountain part 21 and a valley part 22, the mountain part 21 and the valley part 22 are formed with a cycle of a micron pitch, reflection preventing structures 23 comprising fine projecting and recessed parts of a submicron pitch are formed on the surface of the mountain part 21 and the valley part 22, and the heights of the projecting and recessed parts of the reflection preventing structures 23 of the mountain part 21 and the valley part 22 which constitute the diffraction grating are different from each other. <P>COPYRIGHT: (C)2006,JPO&NCIPI |