Arc preventing method and apparatus of Electron Beam Evaporation System,申请号KR20040044551-传众专利搜索

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发明名称	Arc preventing method and apparatus of Electron Beam Evaporation System
摘要
申请公布号	KR100599077(B1)	申请公布日期	2006.07.13
申请号	KR20040044551	申请日期	2004.06.16
申请人		发明人
分类号	H01J9/20	主分类号	H01J9/20
代理机构		代理人
主权项
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