| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a grinding pad excellent in balance between supply and exhaust of grinding slurries. <P>SOLUTION: This grinding pad 1 contains a grinding layer which consists of multiple porous materials. In addition, the grinding surface of this grinding layer has a groove, and at least a part of the interior of the groove has a non-perforating surface. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
