发明名称 MIRROR DEVICE, MIRROR ARRAY, OPTICAL SWITCH, MIRROR DEVICE MANUFACTURING METHOD AND MIRROR SUBSTRATE MANUFACTURING METHOD
摘要 A mirror (153) turnably supported on a mirror substrate (151), driving electrodes (103-1 to 103-4) formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) arranged in a space between the mirror and the electrode substrate are provided. Thus, a potential of a lower plane of the mirror can be fixed by giving a second potential to the antistatic structure, and a drift of the mirror can be suppressed.
申请公布号 WO2006073111(A1) 申请公布日期 2006.07.13
申请号 WO2005JP24078 申请日期 2005.12.28
申请人 NIPPON TELEGRAPH AND TELEPHONE CORPORATION;SHIMOKAWA, FUSAO;UCHIYAMA, SHINGO;YAMAGUCHI, JOHJI;SATO, MAKOTO;SASAKURA, KUNIHIKO;MORITA, HIROFUMI;INAGAKI, SHUICHIRO;MACHIDA, KATSUYUKI;ISHII, HIROMU 发明人 SHIMOKAWA, FUSAO;UCHIYAMA, SHINGO;YAMAGUCHI, JOHJI;SATO, MAKOTO;SASAKURA, KUNIHIKO;MORITA, HIROFUMI;INAGAKI, SHUICHIRO;MACHIDA, KATSUYUKI;ISHII, HIROMU
分类号 G02B26/08;B81B3/00 主分类号 G02B26/08
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