| 摘要 |
PROBLEM TO BE SOLVED: To provide an atomic force microscope, capable of improving precision in sample analysis when the atomic force microscope is using AC mode. SOLUTION: A probe 36 is formed on the tip side of a cantilever 35, extending from an approximately plate-shaped base part 34. The base part 34 is mounted by a mounting means 30 to a seating part 28 provided with an oscillator 26. The probe 36 scans a sample 14, while vertically oscillating by making the cantilever 35 resonantly oscillate by the oscillator 26. By detecting the changes with a detector 21 in the vertical oscillations of the cantilever 35 generated by the contact of the probe 36 with the sample 14, the atomic force microscope 13 analyses the sample 14. A base part oscillation suppression means, for suppressing resonant oscillations generated in the base part 34 by oscillations of the oscillator 26, is provided for at least either the base part 34 or the mounting means 30. COPYRIGHT: (C)2006,JPO&NCIPI
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