| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid state image sensor exhibiting excellent optical characteristics by enhancing light collection efficiency furthermore even in microfabrication and reducing leakage of incident light. SOLUTION: The solid state image sensor comprises a photoelectric converting section, a charge transfer section having an electrode for transferring charges generated at the photoelectric converting section, and an optical waveguide for introducing incident light to the photoelectric converting section while confining. The optical waveguide comprises a first translucent film formed on the photoelectric converting section and having a predetermined refractive index and a light guide function, and a second translucent film formed to surround the first translucent film and having a void layer. COPYRIGHT: (C)2006,JPO&NCIPI
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