| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a mask case for gripping a large photomask with increased size and weight in a high cleanliness state, preventing the mask from being damaged or contaminated during storage or conveyance, and allowing the mask to be easily taken in and out, and a case exchanging apparatus. <P>SOLUTION: The case for a large photomask is composed of a tray and a top cover for housing and conveying a large photomask, and has a metal frame on at least the top cover of the case, a pawl protruding from the metal frame to the inside of the case so as to grip and fix a photomask, and a handle protruding outward from the metal frame. A photomask can be fixed by the pawl to the inside of the top cover while the tray is separated from the top cover, and be conveyed by gripping the handle outside the top cover by a worker or a conveying apparatus. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
