发明名称 |
Multi-layer thin film in a ballistic electron emitter |
摘要 |
An electron emitter that includes a metal film having a set of layers that are selected and arranged to adhere the metal film to a remainder of a structure of the electron emitter while avoiding electron loss in the metal film. A multiple layer metal film according to the present techniques enables a balance among adhesion properties, metal diffusion, and oxide properties that might otherwise hinder the performance of an electron emitter.
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申请公布号 |
US2006151777(A1) |
申请公布日期 |
2006.07.13 |
申请号 |
US20050033768 |
申请日期 |
2005.01.12 |
申请人 |
NABERHUIS STEVEN L;KUO HUEI-PEI;LAM SI-TY;BIRECKI HENRYK;SHENG XIA |
发明人 |
NABERHUIS STEVEN L.;KUO HUEI-PEI;LAM SI-TY;BIRECKI HENRYK;SHENG XIA |
分类号 |
H01L29/06 |
主分类号 |
H01L29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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