发明名称 Multi-layer thin film in a ballistic electron emitter
摘要 An electron emitter that includes a metal film having a set of layers that are selected and arranged to adhere the metal film to a remainder of a structure of the electron emitter while avoiding electron loss in the metal film. A multiple layer metal film according to the present techniques enables a balance among adhesion properties, metal diffusion, and oxide properties that might otherwise hinder the performance of an electron emitter.
申请公布号 US2006151777(A1) 申请公布日期 2006.07.13
申请号 US20050033768 申请日期 2005.01.12
申请人 NABERHUIS STEVEN L;KUO HUEI-PEI;LAM SI-TY;BIRECKI HENRYK;SHENG XIA 发明人 NABERHUIS STEVEN L.;KUO HUEI-PEI;LAM SI-TY;BIRECKI HENRYK;SHENG XIA
分类号 H01L29/06 主分类号 H01L29/06
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