| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor analyzer and its method capable of analyzing failure of a semiconductor circuit simply at low cost. SOLUTION: This semiconductor analyzer includes a means for applying a liquid insulating material 12 onto an insulating layer 24 and an extraction electrode 26, a means for allowing the applied insulating material 12 to have a film shape, and a means for hardening the insulating material 12 having the film shape. The semiconductor analyzer also includes a means for forming a via hole in the insulating material 12, and a means for forming a conductive pad on the insulating material 12 and connecting the extraction electrode 26 to the pad. COPYRIGHT: (C)2006,JPO&NCIPI
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