| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing device of an organic EL element and the organic EL element wherein, by a new connection terminal structure, a process margin of laser working is widened, a further improvement in manufacturing yield can be achieved, and practicality is superior. SOLUTION: This manufacturing device of the organic EL element is composed by forming a sealing film 13 to seal a light emitting part 12 on it formed by sequentially laminating a cathode, an organic light emitting layer, and an anode on a substrate 11, and formed with a sealing film forming a mechanism to laminate and form the sealing film 13 on the nearly whole surface of the substrate 11, and with a sealing film removing mechanism to form an opening 15 for power supply which exposes a terminal 14 by irradiating a laser beam on one part of the whole part of the sealing film 13 laminated on the terminal part 14 of the anode or the cathode composed of at least a metal film 14a and a laser reflecting film 14b laminated on the metal film 14a, and by removing the sealing film 13 on the terminal part 14. COPYRIGHT: (C)2006,JPO&NCIPI
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