发明名称 COOLING DEVICE AND EXPOSURE DRAWING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To prevent a damage from spreading when a coolant leaks from an inlet connecting portion or a discharge connecting portion guiding the coolant to and from a plurality of cooling members, by specifying in an early stage the inlet connecting portion or the discharge connecting portion where the coolant leaks. <P>SOLUTION: Inlet pipes 62A to 62D to supply a coolant to a plurality of cooling members 52A to 52D are connected to pipes 54 of the cooling members 52A to 52D at the inlet connecting portions 63A to 63D, respectively. Discharge pipes 64A to 64D to discharge a coolant from a plurality of cooling members 52A to 52D are connected to pipes 54 of the cooling members 52A to 52D at the discharge connecting portions 64A to 64D, respectively. The inlet connecting portions 63A to 63D and the discharge connecting portions 65A to 65D are disposed on one plane in the back of a cooling device 50 for a light source. Thereby, the inlet connecting portions 63A to 63D or the discharge connecting portions 65A to 65D where the coolant leaks is specified in an early stage, when the coolant leaks. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006184539(A) 申请公布日期 2006.07.13
申请号 JP20040377902 申请日期 2004.12.27
申请人 FUJI PHOTO FILM CO LTD 发明人 HIROTA HIROYUKI;HASHIGUCHI AKIHIRO
分类号 G03F7/20;F21V29/00;F25D9/00 主分类号 G03F7/20
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