| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid working device for a micropore, eliminating the need of fine control for an extrusion piston for extruding slurry containing a polishing agent such as abrasive grains at extremely high pressure under extremely high pressure and inhibiting slurry from passing through a flow meter. SOLUTION: This flow working device for a micropore includes: a first cylinder 4 for extruding slurry 3 containing a polishing agent such as abrasive grains toward a micropore 1 of a work 2; a second cylinder 6 for extruding water 5 for driving the first cylinder; a third cylinder 8 for extruding water 5 for driving the second cylinder 6; pressure oil 99 for driving the third cylinder 8; a fluid pressure source 9 for extruding pressure oil 99; a flow meter 10 for detecting the flow rate of water 5; and a pressure gauge 31 for detecting the pressure of slurry 3, wherein the AC servo motor 93 is controlled so that the slurry pressure detected by the pressure gauge 31 maintains predetermined slurry pressure and a fluid pressure control device 91 keeps the oil pressure of pressure oil 99 to oil pressure corresponding to the predetermined slurry pressure, and when the flow rate of water 5 measured by the flow meter 10 reaches a predetermined value, a third piston 81 is stopped. COPYRIGHT: (C)2006,JPO&NCIPI |
