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发明名称
摘要
申请公布号	JP3795822(B2)	申请公布日期	2006.07.12
申请号	JP20020101244	申请日期	2002.04.03
申请人		发明人
分类号	G01R31/28;G01R31/3181;G01R31/3183;G01R31/3185;G01R31/3187;G11C29/10;G11C29/12;H01L21/822;H01L27/04	主分类号	G01R31/28
代理机构		代理人
主权项
地址

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