发明名称 |
DIAPHRAGM CHANGING DEVICE |
摘要 |
The invention relates to an optical imaging device, in particular an objective 1 for microlithography in the field of EUVL for producing semiconductor components, having a beam path 2, a plurality of optical elements 3 and a diaphragm device 7 with an adjustable diaphragm opening shape. The diaphragm device has a diaphragm store 7a, 7b with a plurality of different diaphragm openings 6 with fixed shapes in each case, which can be introduced into the beam path 2. |
申请公布号 |
EP1678558(A1) |
申请公布日期 |
2006.07.12 |
申请号 |
EP20030782453 |
申请日期 |
2003.12.18 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
BIEG, HERMANN;WILL, MARCUS;BISCHOFF, THOMAS;KWAN, YIM-BUN, PATRICK;NGUYEN, UY-LIEM;XALTER, STEFAN;MUEHLBEYER, MICHAEL |
分类号 |
G02B5/00;G02B13/14;G03F7/20 |
主分类号 |
G02B5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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