| 摘要 |
The invention automates determination of the quantity of a index matching liquid. The invention is a liquid quantity determination unit to determine the quantity of a filling liquid to be filled between a plurality of optical components, and includes an inspection beam emitting unit to emit an inspection beam substantially vertically to an opposed surface of one of a pair of the optical components facing each other with the filling liquid interposed therebetween, a transporting unit to transport the inspection beam emitting unit to emit the inspection beam to a desired inspection point on the opposed surface, a reflecting point identifying unit to identifying the reflecting point of the inspection beam based on a reflected beam of the inspection beam emitted from the inspection beam emitting unit toward the opposed surface, and a determination unit to determine the presence or absence of the filling liquid at the inspection point based on the reflecting point determined by the reflecting point identifying unit.
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